Yonsei-Samsung SDI Joint Research Team Creates New Silicon Material for Use in Semiconductor Manufacturing Process

A joint Yonsei-Samsung SDI research team has developed new soluble silicon materials and silicon thin films with optimal properties for use in the manufacturing of semiconductors. The Yonsei researchers were led by Professor Cho Hyeon-mo (University College) and Professor Lee Myong-euy (Chemistry and Medical Chemistry). Their article detailing the findings of the research, “Soluble polycyclosilane-polysiloxane hybrid material and silicon thin film with optical properties at 193nm and etch selectivity,” appeared in January in the Journal of Materials Chemistry C, a publication of the Royal Society of Chemistry.